Автор: Alain Claverie

. Transmission Electron Microscopy in Micro-nanoelectronics

Transmission Electron Microscopy in Micro-nanoelectronics

Alain Claverie

Today, the availability of bright and highly coherent electron sources and sensitive detectors has radically changed the type and quality of the information which can be obtained by transmission electron microscopy (TEM). TEMs are now present in...

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