Measurement Technology for Micro-Nanometer Devices
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A fully comprehensive examination of state-of-the-art technologies for measurement at the small scale • Highlights the advanced research work from industry and academia in micro-nano devices test technology • Written at both introductory and advanced levels, provides the fundamentals and theories • Focuses on the measurement techniques for characterizing MEMS/NEMS devices
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Категория: электроника
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Правообладатель: John Wiley & Sons Limited
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Возрастное ограничение: 0+
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ISBN: 9781118717981
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Легальная стоимость: 17597.10 руб.
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